HDI Instrument SRA-FA Surface Reflectance Analyzer (now KLA-Tencor) - Used

This HDI system is capable of optically scanning, in a matter of seconds, the entire surface of a substrate providing measurement data and visual images of a wide range of surface properties. The SRA can handle most every kind of substrate material and are excellent for: Detection, classification and mapping of residues, stains, pits, bumps, contamination and other types of defects left from a substrate cleaning process Detection, classification and mapping of residues, scratches and particles left from a substrate polishing process Measurement of the thickness and other characteristics of a deposited coating and visually displaying coating uniformity variations, for most any type of coating material and deposition process Detection and measurement of surface smoothness/waviness and variations Inspection and detection of surface tribology performance problems and issues HDI instruments are widely used in R&D, failure analysis, incoming inspection and manufacturing process control.

It can be used for both disks and wafers. This system comes with the 65mm and 95mm collets for disks.